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发明名称
Method for preparing large-size substrate
摘要
申请公布号
EP1566241(B1)
申请公布日期
2007.07.25
申请号
EP20050250912
申请日期
2005.02.17
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
SHIBANO, YUKIO;KUSABIRAKI, DAISUKE;UEDA, SHUHEI;WATABE, ATSUSHI
分类号
B24C1/00;B24C7/00
主分类号
B24C1/00
代理机构
代理人
主权项
地址
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