| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture ultrapure water in which TOC concentration is low by efficiently removing an organic substance, particularly a low molecular weight organic substance in raw water. <P>SOLUTION: The apparatus for manufacturing ultrapure water has a primary water cleaning system 2, and a sub system for treating the water treated with the primary system. In the primary system, the raw water is passed through a biological activated carbon tower to biologically decompose the organic substance under a condition existing no antibacterial, and then an antibacterial treatment is carried out. Lacked phosphor is supplied for biological decomposition of TOC by adding phosphor to water flowing in the biological activated carbon tower. <P>COPYRIGHT: (C)2003,JPO |
