SUPPORT DEVICE, STAGE DEVICE, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

A support apparatus, a stage apparatus, an exposure apparatus, etc. are proposed that can increase response of a relative movement between a piston and a cylinder, etc. are proposed. There is provided a support apparatus (300) including: a cylinder portion (311); a piston portion (312) that is provided inside the cylinder portion (311) and is movable in a Z direction; a fluid bearing (307) formed in at least a portion between an inner wall (311 c) of the cylinder portion (311) and an outer wall (312d) of the piston portion (312), the support apparatus supporting a supported member (42) in the Z direction with respect to a support member (43) by means of a biasing force generated by the cylinder portion (311) and the piston portion (312), in which fluids (G1, G2) are supplied independently inside the fluid bearing (307) and the cylinder (311).