| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin-film magnetic head, for obtaining a thin-film magnetic head having high heat radiation while maintaining insulation between a lower shield layer and a substrate. SOLUTION: The thin-film magnetic head includes a magneto-resistive effect element between upper and lower shield layers and a structure where a lower shield layer 22 is buried in a first insulating layer 21 on a substrate. A recess 21c is formed from the first insulating layer side of a substrate 20 having the first insulating layer through the first insulating layer to reach the substrate, a second insulating layer 21-3 is formed for insulation from the substrate 20 in the recess 21c, and a lower shield layer 22 is formed in the recess 21c. COPYRIGHT: (C)2007,JPO&INPIT |
