METHOD FOR MANUFACTURING SINGLE-WALLED CARBON NANOTUBE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a single-walled carbon nanotube comprising growing a high-quality single-walled carbon nanotube on a glass substrate within a relatively low temperature range. SOLUTION: The method for manufacturing a single-walled carbon nanotube comprises the steps of: forming a buffer layer on a glass substrate; forming a catalyst metal layer on the buffer layer; introducing the glass substrate having the catalyst metal formed thereon into a vacuum chamber to generate an H2O plasma in the vacuum chamber; and supplying a source gas into the vacuum chamber to grow a carbon nanotube on the glass substrate. COPYRIGHT: (C)2007,JPO&INPIT