A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective comprises a lens group comprising at least one focusing lens configured to receive light energy and form focused light energy. The focused light energy forms an intermediate image. The objective further comprises at least one field lens located in proximity to an intermediate image, and a catadioptric arrangement positioned to receive the intermediate light energy from the at and form controlled light energy. The catadioptric arrangement may comprise at least one Mangin element and can include a meniscus lens element.
申请公布号
WO2006105122(A3)
申请公布日期
2007.07.19
申请号
WO2006US11342
申请日期
2006.03.28
申请人
KLA-TENCOR TECHNOLOGIES CORPORATION;CHUANG, YUNG-HO;SHAFER, DAVID;ARMSTRONG, JOSEPH, J.
发明人
CHUANG, YUNG-HO;SHAFER, DAVID;ARMSTRONG, JOSEPH, J.