| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer mirror, having internal stresses reduced and restrained from changing with the elapse of time. <P>SOLUTION: The multilayer mirror 1 comprises a substrate SB and a multilayer film 10 formed on the substrate, by alternately laminating silicon and molybdenum, and reflects a light with a wavelength of 20 nm or shorter. The multilayer film 10 is composed of a combination of the first layer 12, having tensile stress and the second layer 14 having a compression stress laminated, in this order, on the substrate SB. The first layer 12 has a specified cyclic structure, consisting of a molybdenum film 12a and a silicon film 12b, and is annealed, after the formation of the layer on the substrate SB. Similarly, the second layer 14 has a specified cyclic structure consisting of a molybdenum film 14a and a silicon film 14b, and the multilayer 10 is annealed at specified conditions, after formation of the layer 14 on the first layer 12. <P>COPYRIGHT: (C)2007,JPO&INPIT |
