| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of obtaining the situation of decrease in inspection accuracy due to tilting of an imaging means. SOLUTION: The inspection device comprises the imaging means 17 for imaging a mark on a substrate 10A, and an image processing means 18 for taking in the image of the mark based on an output from the imaging means and determining the tilting of the imaging means with respect to the substrate based on the image. COPYRIGHT: (C)2007,JPO&INPIT
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