<p>A sputtering apparatus using an AC power supply which can receive electric power with high accuracy irrespective of the distance between the place when the sputtering apparatus is installed and the place where the AC power supply is supplied. In a vacuum chamber (11), a pair of targets (41a, 41b) and an AC power supply (E) for alternatingly applying different polarity of voltages with a predetermined frequency to the paired targets are provided. The AC power supply (E) for supplying electric power is composed separately of a power supply part (6) and an oscillation part (7) having an oscillation switch circuit (72) connected to the power line from the power supply part. The oscillation part and the targets are connected through a bus bar (8).</p>
