| 摘要 |
PROBLEM TO BE SOLVED: To provide an suction pad capable of transporting a workpiece without leaving any suction trace. SOLUTION: The suction pad 10 comprises a rubber suction pad body 13 with an air suction port 11 to suck air and a membrane 92 formed on the suction face side of the suction pad body 13 to prevent the rubber component of the suction pad body 13 from leaking out so that a transfer object is adsorbed and held by the suction face. The suction pad body 13 is composed of a silicon rubber. The membrane 92 has the dynamic modulus of elasticity in a range of 2.4×10<SP>7</SP>to 2.45×10<SP>7</SP>Pa at the temperature of 27-28°C when giving the sinusoidal distortion of the frequency of 5 Hz by crosslinking molecules constituting the rubber component by irradiating electron beams on the suction face side of the suction pad body 13. COPYRIGHT: (C)2007,JPO&INPIT
|
