Micromechanical sensor, has diaphragm and counter unit, where hollow space is arranged between diaphragm and unit, where unit has perforation openings that comprise inhomogeneous surface distribution

摘要

The sensor has a diaphragm (20) and a counter unit (30), where a hollow space is arranged between the diaphragm and the unit. The unit has perforation openings (50) that comprise inhomogeneous surface distribution. The openings comprise a geometry that varies on the unit, where an electrical signal is produced during movement of the diaphragm, and surface distribution of the openings is dependent on displacement of the diaphragm. An independent claim is also included for a method for manufacturing a micromechanical sensor.