FOUP door transfer system

摘要

A device ( 12 ) picks up at least one semi-conductor wafer ( 11 ) from a container ( 14 ) of wafers fitted on one side ( 15 ) of an aperture ( 13 ) in the transfer station ( 10 ) of a semi-conductor wafer processing plant. The device is on the opposite side ( 17 ) of the aperture and the pick-up is effected through it. The device incorporates a shutter ( 1 ) movable between open and closed positions. A wafer picking up means ( 2 ) is attached to the shutter and is designed to enter partially within the container below a wafer and seize the wafer by its edge. A pick up moving means ( 3 ) moves the picking up means ( 2 ) back and forth through the aperture ( 13 ).