发明名称 RECIPROCATING APERTURE MASK SYSTEM AND METHOD
摘要 <p>An apparatus for depositing a pattern of material on a substrate includes reciprocating aperture mask. A feed magazine houses a plurality of jigs, each of the jigs configured to support a mask having apertures defining a pattern. A shuttle mechanism receives a selected jig presented by the feed magazine and establishes contact between the mask of the selected jig and the substrate. The shuttle mechanism moves the selected jig in line with the substrate and relative to the deposition source so that deposition material passes through the apertures of the mask of the selected jig to develop the pattern of the deposition material on the substrate.</p>
申请公布号 WO2007078694(A1) 申请公布日期 2007.07.12
申请号 WO2006US47292 申请日期 2006.12.12
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 SCHREIBER, BRIAN E.,
分类号 H01L21/027 主分类号 H01L21/027
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