| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface potential sensor capable of measuring a work potential based on the potential of a device frame with a simple constitution. SOLUTION: A controller part 22 of this surface potential sensor 20 samples a detection signal outputted from a sensor part 21, and stores the first representative value acquired by measuring an electric field in a domain Z of a frame 11 when a work W does not exist, and the second representative value acquired by measuring the electric field when the work W exists. Then, the controller part 22 detects a charged amount of the work W, based on the first representative value and the second representative value stored together. COPYRIGHT: (C)2007,JPO&INPIT
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