| 摘要 |
PROBLEM TO BE SOLVED: To detect highly accurately displacement of a moving body and position information. SOLUTION: A semiconductor laser 51 is fixed on a piezoelectric element 53. The driving direction of the piezoelectric element 53 is set orthogonally to the emitting direction of a laser beam. The piezoelectric element 53 fluctuates the position of the semiconductor laser 51 periodically in the X-axis direction. The emission position of laser light from a light source 3 is fluctuated periodically in the X-axis direction by the fluctuation. Since the semiconductor laser 51 has a small size and a light weight, a vibration frequency can be heightened. COPYRIGHT: (C)2007,JPO&INPIT
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