| 摘要 |
PROBLEM TO BE SOLVED: To provide an air returning device for a clean room capable of exerting stable air cleaning effect without unevenness in indoor cleanliness. SOLUTION: This air returning device for the clean room comprises a perforated panel 18 configurating an upper floor surface 20 and comprising ventilatable through holes 18a, and a plurality of air returning ducts 24 disposed between the upper floor surface 20 and a floor slab surface 14. A plurality of suction openings 26 are respectively formed on an end portion of each of air returning ducts 24 in a state of being expanded to a prescribed range of the upper floor surface 20. The suction openings 26 are vertically opened at the end portions of the air returning ducts 24. The air returning ducts 24 are formed into the L-shape, the plurality of air returning ducts 24 are arranged in parallel with each other in a prescribed range between the upper floor surface 20 and the floor slag surface 14, and the suction openings 26 are dispersed to the prescribed range. COPYRIGHT: (C)2007,JPO&INPIT
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