| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a crystal resonator whereby exfoliation of connection terminals can be suppressed. SOLUTION: The method of manufacturing the crystal resonator respectively adheres a first glass substrate to one side of a crystal substrate on which a plurality of resonator chips each provided with a pair of voltage application electrodes are formed at a prescribed interval and a second glass substrate formed with openings in matching with positions of the voltage application electrodes to the other side to seal each resonator chip, provides a conductive thin film connected to the voltage application electrodes to a surface 301 of the second glass substrate 300, and separates each resonator chip in a sealing state by cutting works. Prior to the provision of the conductive thin film, the manufacturing method applies adhesiveness improvement step of continuously or discretely improving the adhesiveness of the conductive thin film to a region A wider than a cutting line L including the cutting line L on the surface of the second glass substrate 300. COPYRIGHT: (C)2007,JPO&INPIT
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