发明名称 METHOD AND APPARATUS FOR CONTROLLING THE VAPORIZATION OF ORGANIC MATERIAL
摘要 A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
申请公布号 KR20070074616(A) 申请公布日期 2007.07.12
申请号 KR20077010468 申请日期 2005.11.09
申请人 EASTMAN KODAK COMPANY 发明人 BOROSON MICHAEL LOUIS;LONG MICHEAL;GRACE JEREMY MATTHEW;ZHANG JINMEI;KOPPE BRUCE EDWARD;PALONE THOMAS WILLIAM;REDDEN NEIL PETER
分类号 H01L21/203 主分类号 H01L21/203
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