| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual examination support apparatus for enhancing the efficiency of visual examination. SOLUTION: In a display execution part 213, the inspection target image data IT (the image data of a substrate 7) specified by the serial number of the substrate 7 is acquired from an image data base server 3 and an inspection target image is displayed on an inspection screen on the basis of inspection target image data. In a blocking part 212, a predetermined number of blocks are set to the inspection target image. An inspector touches with the defective place of the inspection target image. In a touch block judging part 214, the block number of the block concerted (error block) is reported to a data base control part 31 on the basis of the touch position of the inspection target image and, in the data base control part 31, a block high in the occurring ratio of an error is specified using the block number of the error block collected with respect to a defective substrate 7. In the display execution part 213, the block specified in the inspection target image is emphasized to be displayed. By this constitution, the block high in the occurring ratio of the error can be inspected propenderantly. COPYRIGHT: (C)2007,JPO&INPIT
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