发明名称 |
HANDLER FOR TESTING SEMICONDUCTOR DEVICES AND METHOD FOR CONTROLLING THE SAME |
摘要 |
A semiconductor device test handler and a controlling method thereof are provided to reduce the size of the handler by changing the position of a test tray between a horizontal state and a vertical state using an improved rotator structure composed of a first and a second rotators. A semiconductor device test handler includes a loading unit(30) for loading semiconductor devices on a test tray of a horizontal state; a first chamber for heating or cooling the semiconductor devices of the test tray; a first rotator(52) for changing the position of the test tray from the horizontal state to a vertical state; a test unit with a test head capable of performing predetermined tests on the semiconductor devices; a second chamber for returning the temperature of the semiconductor devices; a second rotator; and an unloading unit. The second rotator(72) is used for changing the position of the test tray from the vertical state to the horizontal state. The unloading unit(40) is used for unloading the semiconductor devices from the test tray.
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申请公布号 |
KR20070074262(A) |
申请公布日期 |
2007.07.12 |
申请号 |
KR20060002203 |
申请日期 |
2006.01.09 |
申请人 |
MIRAE CORPORATION |
发明人 |
PARK, YONG GEUN;YUN, DAE GON |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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