| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of stabilizing a cyclotetrasiloxane, which is used in a chemical vapor growing process for silicon oxide in manufacturing an electronic material, to polymerization, and its composition. SOLUTION: The method includes supply of an effective amount of a neutral or weak acid polymerization prohibitor to, for instance, a cyclotetrasiloxane like 1,3,5,7-tetramethylcyclotetrasiloxane, and the composition contains such a cyclotetrasiloxane and the neutral or weak acid polymerization inhibitor. A free radical scavenger can be made to be contained in the method, also in the composition. COPYRIGHT: (C)2007,JPO&INPIT
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