发明名称 Method of manufacturing CMOS image sensor
摘要 Disclosed is a method of manufacturing a CMOS image sensor. The method includes the steps of forming a dielectric layer on a semiconductor substrate having a photodiode therein; forming a color filter array having a plurality of color filters on the dielectric layer; forming a plurality of micro-lenses on the color filter array, each micro-lens corresponding to one of the color filters; and performing a plasma surface treatment on the micro-lens.
申请公布号 US2007161147(A1) 申请公布日期 2007.07.12
申请号 US20060644203 申请日期 2006.12.21
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KIM YUNG P.
分类号 H01L21/00 主分类号 H01L21/00
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