发明名称 HEMT DEVICE AND METHOD OF MAKING
摘要 <p>A HEMT type device which has pillars with vertical walls perpendicular to a substrate. The pillars are of an insulating semiconductor material such as GaN. Disposed on the side surfaces of the pillars is a barrier layer of a semiconductor material such as AlGaN having a bandgap greater than that of the insulating material of the pillars. Electron flow is confined to a narrow channel at the interface of the two materials. Suitable source, drain and gate contacts are included for HEMT operation.</p>
申请公布号 EP1805790(A2) 申请公布日期 2007.07.11
申请号 EP20050801062 申请日期 2005.09.09
申请人 NORTHROP GRUMMAN CORPORATION 发明人 CLARKE, ROWLAND, C.;AUMER, MICHEL, E.
分类号 H01L29/778;H01L21/338 主分类号 H01L29/778
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