| 摘要 |
<p>A photosensitive film is provided by laminating a photosensitive layer and a supporting body. A board-shaped laminated body is provided by bonding the side of the photosensitive layer on a substrate. At the time of exposing a prescribed pattern on the photosensitive layer of the board-shaped laminated body, reaction with oxygen in the photosensitive layer of the board-shaped laminated body from which the supporting body is peeled is made as small as possible. A peeling apparatus (180) for peeling the supporting body from a photosensitive material (150) is provided in exposure equipment (1). After peeling the supporting body from the photosensitive material (150) by the peeling apparatus (180), pattern exposure is immediately performed to the photosensitive material (150) by a scanner (162).</p> |
