| 摘要 |
FIELD: synthesis of nano-diamonds or ultra-dispersion diamonds. ^ SUBSTANCE: nano-diamond powders are produced in UHF plasma of carbon-containing gas steams, for example, ethanol, on substrate having temperature at which polymer-like hydrocarbon film is simultaneously precipitated onto it. Synthesis of nano-diamond powders in nano-porous hydrocarbon matrix, preventing their unitizing during long storage, is realized by simplified technology, compatible with common technological processes of micro-electronic industry, capable of control over their dimensions and concentration. ^ EFFECT: increased efficiency. ^ 2 cl |
