摘要 |
A piezoelectric pump and a Stirling refrigerator. The piezoelectric pump (6) comprises a casing (32) formed by welding a plurality of metal members to each other, a piezoelectric element (36) partitioning a space in the casing (32) into an operating space (34) and a back pressure space (35), and resin internal parts (33A, 33B) installed between the casing (32) and the piezoelectric element (36) and holding the piezoelectric element (36). The internal parts (33A, 33B) are formed of an easy-to-machine and easy-to-mold resin. The internal part (33A) specifies the outer periphery of the operating space (34) and the internal part (33B) specifies the outer periphery of the back pressure space (35). Since a recessed part is formed between the internal parts (33A, 33B) by facing the internal parts (33A, 33B) each other, the piezoelectric element (36) can be holdingly stored in the recessed part.
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