| 摘要 |
A compact source having an X-ray beam of very high brilliance is provided to lengthen a life time of a rotary anode within an X-ray source. A vacuum container(7) is defined by a sealing wall. A vacuum pump(1) includes a stator(1b) installed within an outer sealing casing(1f), a rotor(1a), and rotor controllers(10a-10e) and is connected to the vacuum container in order to form a vacuum state of the vacuum container. A cathode(3) is formed to generate lines of electric force within the vacuum container. A rotary anode(2) is rotated around a rotary shaft within the vacuum container. An edge(2a) of the rotary anode receives the lines of electric force from the cathode in order to radiate an X-ray to an outlet(11). The rotary anode is connected to the rotor and is disposed in the same axis as the axis of the rotor. The sealing casing is used for forming the sealing wall of the vacuum container. One or more cooling elements(8,9) are fixed to the stator or the outer sealing casing facing main radiative surfaces(2b,2c) of the rotary anode.
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