| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To precisely form an electrode film even when the compact or subminiature piezoelectric resonator chip is formed. <P>SOLUTION: A method of manufacturing the piezoelectric resonator chip includes: an outward form forming step by applying wet etching to a piezoelectric substrate 4 with an etching anisotropy to form an element chip of the piezoelectric resonator chip; and an electrode forming step for forming a required driving electrode after the forming of the outward form. In the method, after the etching, the electrode film acting like the driving electrode is formed to the substrate except anisotropic regions 54-1, 54-2, 54-3 by the etching anisotropy, and the driving electrode is formed by the method of the photolithography. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
