| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device excellent in the uniformity of a temperature distribution and the stability of cleanness, capable of being charged by the unit of magazines storing a plurality of objects to be heated, being thermally processed, and being taken out. SOLUTION: The heating device 10 comprises a magazine storage chamber 13 which is formed between two sidewalls 12 for heating oppositely arranged in a box shape outer furnace body 11 made of an heat insulating material, a rear wall 14 for heating arranged on the rear surface side of the magazine storage chamber 13, plate heaters 12h, 14h respectively arranged on the side walls 12 for heating and the rear wall 14 for heating as heat generating means, a door body 15 openably arranged at a position separated from the sidewall 12 for heating at the front surface side of the magazine storage chamber 13, and an auxiliary door body arranged between the door body 15 and the magazine storage chamber 13. The door body 15 is pivotally supported by a plurality of hinges 15a so as to be rotatable, including a lock mechanism 15b for keeping the door body 15 in a closed state. COPYRIGHT: (C)2007,JPO&INPIT
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