POLARIZED IRRADIATION METHOD FOR LIGHT ORIENTATION AND DEVICE THEREOF

摘要

A polarized irradiation device for light orientation is formed by an optical system and a stage system. The optical system includes a polarized ultraviolet laser outputting rectilinear light, a beam expander, a diffraction optical element, a light shield plate, and an irradiation lens. The polarized ultraviolet laser outputs a rectilinear polarized light. The diameter of a laser beam outputted from the polarized ultraviolet laser is increased by the beam expander. Here, a lens having a long focal length is used for the beam expander. An orientation film substrate is held onto an XYZ? stage by vacuum adsorption or the like. Irradiation of the orientation film by the laser beam is performed partially by reducing the irradiation region. The XYZ? stage is step-and-repeat scanned in two directions: X direction and Y direction so as to apply the polarized light over the entire surface of the orientation film substrate. This reduces the size of the polarized irradiation device for light orientation when giving the orientation control ability to the orientation film of a liquid crystal display element substrate by using polarized light.