| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrocast and a stamper excellent in durability and less deformation. SOLUTION: A conductor film 16 is formed by sputtering on a fine pattern formed on a glass original plate 15, and a plated film 17 is made of nickel by electrocasting. When forming this plated film 17, the electrocasting conditions (for example, electric current density) are adjusted for the nickel crystals composing the plated film 17 so that the crystallite size of a largest one regarded as a single crystal is 50 nm or smaller, the average particle diameter is 170μm or less in the crystal growth direction (thickness direction), and that in the direction perpendicularly crossing the crystal growth direction (plane direction) is 10μm or less. COPYRIGHT: (C)2007,JPO&INPIT
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