| 摘要 |
PROBLEM TO BE SOLVED: To provide a robot hand of a substrate carrying robot capable of enlarging a carriable area of a substrate, without replacing an existing robot body. SOLUTION: A movable area of a wafer 21 required for carrying the wafer 21 can be provided, even when not reaching the movable area required for carrying the wafer 21 in a movable area of a tip part of a robot arm by putting the robot hand 20 in an expandable state. Thus, a changeable range of a carrying source position or a carrying destination position can be expanded without replacing the robot body. The possibility that an arm part constituting the robot arm interferes with the other device, can be reduced by putting the robot hand 20 in a degenerate state, and restriction can be reduced in the movement of the robot. COPYRIGHT: (C)2007,JPO&INPIT
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