| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer prober which can reduce measurement preparation time by simple structure. SOLUTION: The wafer prober apparatus 100 is provided with a wafer cassette 101 wherein wafers 103 are housed, a wafer conveyance arm 109 to convey the wafer 103 to a measurement stage 111 from the wafer cassette 101, and a probe card 125 by which the wafer 103 is inspected by using a probe in the measurement stage 111. The wafer cassette 101 is provided with a notch mark 115 which indicates a positional reference in the inplane direction of the wafer 103. COPYRIGHT: (C)2007,JPO&INPIT |
