| 摘要 |
PROBLEM TO BE SOLVED: To provide a system that keeps the distance between a molten pool and a part to be coated in an electron beam physical vapor deposition system by automatic control, and reduces the variability in the coating. SOLUTION: A part P arranged inside a chamber 12 in an electron beam physical vapor deposition system 10 is supported by a rotating shaft 16, and vapors V from a ceramic ingot C are vapor-deposited on the part P. The system 10 includes a crucible 18 configured for receiving the ingot C, a drive for feeding the ingot C into the crucible, and an electron beam gun 30 for melting and vaporizing the ingot C. A temperature sensor 32 monitors the location of a molten pool M within the crucible 18. A controller 34 automatically controls the feed rate of the ingot C in accordance with the detected location of the molten pool M, and reduces variation in a coating applied to the part by keeping the height of the molten pool constant. COPYRIGHT: (C)2007,JPO&INPIT
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