发明名称 Method and apparatus for particle removal
摘要 A method and system for cleaning a surface, having particulate matter thereon, of a substrate features impinging upon the surface a jet of a liquid having coupling elements entrained therein. A sufficient drag force is imparted upon the coupling elements to have the same move with respect to the liquid and cause the particulate matter to move with respect to the substrate.
申请公布号 US2007151583(A1) 申请公布日期 2007.07.05
申请号 US20060543365 申请日期 2006.10.04
申请人 LAM RESEARCH CORPORATION 发明人 FREER ERIK M.;DELARIOS JOHN M.;MIKHAYLICHENKO KATRINA;RAVKIN MICHAEL;KOROLIK MIKHAIL;REDEKER FRITZ C.
分类号 B08B3/00;B08B3/12 主分类号 B08B3/00
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