| 摘要 |
PROBLEM TO BE SOLVED: To enable to easily adjust an electro-optical system of a scanning transmission electron microscope equipped with an aberration compensator. SOLUTION: The scanning transmission electron microscope is equipped with an electron beam source 1, a convergent lens 3, a scanning coil 10, a dark field image detector 16, a bright field image detector 17, an A/D converter 21 and an information processing device 24 or the like. A spherical aberration compensator 7 and deflecting coils 9a, 9b are mounted on a front step of an objective front magnetic field lens 11, a Fourier conversion image is formed from a scanning transmission image obtained by the dark field image detector 16 or the bright field image detector 17, and an appropriate deflection ratio is given feedback by evaluating deviation of aberration compensation status generated by image shift of deflection ratios 9a, 9b of the deflection coils. COPYRIGHT: (C)2007,JPO&INPIT
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