| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope system capable of easily and quickly observing a desired position of an object, an observation method and observation program using the microscope system. SOLUTION: In the microscope system, a user mounts a sample on a sample mounting stand of an atomic force microscope (step S1), and observes the sample with an optical microscope (step S2). The user adjusts the magnification of the optical microscope during observing the sample with the optical microscope (step S2a). The user also retrieves an observed region of the sample with the atomic force microscope during observing the sample with the optical microscope (step S2b). The user further specifies the observed region of the sample with the atomic force microscope from the observed region retrieved in the step S2b (step S3). Then, the user observes the sample with the atomic force microscope in the observed region specified in the step S3 (step S4). COPYRIGHT: (C)2007,JPO&INPIT
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