| 摘要 |
PROBLEM TO BE SOLVED: To reduce the mingled amount of the carbon nanotube having a diameter other than the desired diameter. SOLUTION: The method comprises evacuating the inside of a vacuum tank 1, irradiating synchrotron radiation light 5 (light including either of ultraviolet light, vacuum ultraviolet light and X-ray (soft X-ray)) from a light irradiation device 4 against a sample 3 (a substrate on which the carbon nanotube is formed) supported on a sample holder 2, whereby damaging the carbon nanotube being shy of the desired diameter among the carbon nanotube 6 on the substrate of the sample 3, and leaving the carbon nanotube having the desired diameter and not being damaged. An electron having an acceleration voltage of not more than 86 kV may be irradiated instead of the synchrotron radiation light 5. COPYRIGHT: (C)2007,JPO&INPIT
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