发明名称 OPTICAL PROJECTION SYSTEM
摘要 <p>An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.</p>
申请公布号 EP1803012(A1) 申请公布日期 2007.07.04
申请号 EP20050802258 申请日期 2005.10.01
申请人 CARL ZEISS SMT AG 发明人 RAU, JOHANNES;SCHOEPPACH, ARMIN;GELLRICH, BERNHARD;KUGLER, JENS;MAHLMANN, MARTIN;GEUPPERT, BERNHARD;PETASCH, THOMAS;FUERTER, GERHARD
分类号 G02B7/00;G02B17/08;G03F7/20 主分类号 G02B7/00
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