<p>An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.</p>
申请公布号
EP1803012(A1)
申请公布日期
2007.07.04
申请号
EP20050802258
申请日期
2005.10.01
申请人
CARL ZEISS SMT AG
发明人
RAU, JOHANNES;SCHOEPPACH, ARMIN;GELLRICH, BERNHARD;KUGLER, JENS;MAHLMANN, MARTIN;GEUPPERT, BERNHARD;PETASCH, THOMAS;FUERTER, GERHARD