发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
摘要 A semiconductor device and its fabricating method are provided to reduce a floating body effect in an SOI(Silicon On Insulator) device in which a MOS transistor is formed on a semiconductor layer. A conductive layer(550) and an insulation layer(600) are formed on a semiconductor substrate(100), and then the insulation layer is patterned to form a first opening(610) which penetrates the insulation layer to expose the conductive film pattern. A semiconductor pattern(750) is formed on the insulation layer to be electrically connected to the conductive layer through the first opening, and then transistors(200,900) are formed on the semiconductor pattern. Prior to formation of the conductive layer, a lower interlayer dielectric is formed on the semiconductor substrate.
申请公布号 KR100737920(B1) 申请公布日期 2007.07.04
申请号 KR20060012276 申请日期 2006.02.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, SUNG BONG
分类号 H01L21/336 主分类号 H01L21/336
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