| 摘要 |
Provided is a thinner composition for preventing a photosensitizer from curing at the end of a spray nozzle of the photosensitizer during a semiconductor fabrication process, which shows an excellent dissolution rate and volatility. The thinner composition comprises: (i) an alkyl acetate compound; (ii) an ether compound; and (iii) a cycloketone compound. The alkyl acetate compound includes ethyl acetate, n-propyl acetate, n-butyl acetate or pentyl acetate. The ether compound includes anisole, 1,3-dimethoxybenzene or 1,4-dimethoxybenzene. The cycloketone compound includes cyclopentanone or cyclohexanone. The thinner composition comprises: 100 parts by weight of the alkyl acetate compound; 10-44 parts by weight of the ether compound; and 0.1-30 parts by weight of the cycloketone compound.
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