FARADAY CUP ASSEMBLY AND METHOD FOR CONTROLLING THE FARADAY CUP ASSEMBLY

摘要

A faraday cup assembly is provided to prevent the quantity of iion implantation from being varied with the variation of a transfer speed of a faraday cup by monitoring the transfer speed of the faraday cup. A faraday cup(220) is disposed in a transfer path of an ion beam supplied to a wafer. A driving part(230) transfers the faraday cup between a block position for blocking the transfer path of the ion beam and an open position for opening the transfer path of the ion beam. A detection member(242) detects if the faraday cup is located in the block position and the open position. A control part receives a detection signal from the detection member.