| 摘要 |
A semiautomatic nitrogen supply device of a photoresist supply system is provided to get rid of bubbles semiautomatically when exchanging a storage container by supplying the nitrogen gas, thereby preventing the photoresist coating failure. A semiautomatic nitrogen supply device comprises the followings. Auto on-off valves(104'-1,104'-2) are installed on nitrogen supply lines(102-1,102-2) to operate open/close functions. Auto drain valves(112'-1,112'-2) are installed on drain lines. Bubble sensors(113-1,113-2) are prepared to detect the bubbles exhausted through the drain lines. A controller(124) is prepared to close the auto drain valves and the auto on-off valves when the bubbles are not detected yet.
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