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发明名称
MANUFACTURE OF SEMICONDUCTOR PRESSURE SENSOR
摘要
申请公布号
JPH03209779(A)
申请公布日期
1991.09.12
申请号
JP19900004755
申请日期
1990.01.11
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIBASHI KIYOSHI
分类号
G01L9/04;G01L9/00;H01L29/84
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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