发明名称 |
User interface for quantifying wafer non-uniformities and graphically explore significance |
摘要 |
A graphical user interface for controlling analysis of a wafer map is provided. The user interface provides a graphical selection control for selecting a region of the wafer map for statistical analysis. The user interface is configured to generate statistical data for the selected region to complete the statistical analysis. The statistical data is then displayed for the selected region. Re-generation of the statistical data for display is performed upon detecting a change in the selected region.
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申请公布号 |
US7239737(B2) |
申请公布日期 |
2007.07.03 |
申请号 |
US20020331194 |
申请日期 |
2002.12.24 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
LUQUE JORGE;BAILEY, III ANDREW D.;WILCOXSON MARK |
分类号 |
G06K9/00;G11B27/00;H01L21/66 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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