发明名称 Objective with at least one optical element
摘要 An objective ( 2 ) with at least one optical element ( 4 ), which is mounted in an inner ring ( 3 ). The inner ring ( 3 ) is connected to an outer mount ( 1 ). A manipulator ( 10 ) is provided for displacing the optical element ( 4 ) in at least a direction perpendicular to an optical axis. The inner ring ( 3 ) is connected to the outer mount ( 1 ) by means of at least two adjusting joints ( 5 ) with manipulators ( 10 ) and at least one swivel joint ( 6 ). The at least two adjusting joints ( 5 ) and the at least one swivel joint ( 6 ) are provided with joint arms ( 8 ) extending at least approximately in a tangential direction with respect to the inner ring ( 3 ), by means of which arms the inner ring ( 3 ) is elastically connected to the outer mount ( 1 ). The ends of the joint arms ( 8 ) are articulated on the inner ring ( 3 ) in such a way that temperature-induced changes in length of the joint arms ( 8 ) are converted into a uniform turning direction of the inner ring ( 3 ) with respect to the outer mount ( 1 ) about the center of the optical element.
申请公布号 US7239462(B2) 申请公布日期 2007.07.03
申请号 US20050063113 申请日期 2005.02.22
申请人 CARL ZEISS SMT AG 发明人 RAU JOHANNES;SCHOEPPACH ARMIN;WEBER ULRICH
分类号 G02B7/02 主分类号 G02B7/02
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