| 摘要 |
A pedestal docking system for loading a semiconductor wafer is provided to dock a pedestal into its corresponding chamber simply and exactly by using a directional key. A pedestal docking system includes a pedestal(10), a chamber, a chucking cap(40), and a directional key(60a). A semiconductor wafer is loaded on the pedestal. A plurality of alignment pins(15) are protruded downwards onto a lower portion of the pedestal, and spaced apart from each other along the circumferential direction. The chamber has a chamber housing(21), a receiving groove(22), and a pedestal docking portion(23). The receiving groove is depressed by a preset depth from an upper surface of the chamber housing in order that the pedestal is received into the receiving groove. The pedestal docking portion is formed on a lower part of the receiving groove and has an upper part in which a plurality of pin holes(24), into which the alignment pins are inserted to be supported, are formed. The chucking cap is coupled with the pedestal to lift up the pedestal. The directional key is installed to at least one of the chucking cap and the chamber in order to guide insertion directions of the alignment pins into the pin holes.
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