| 摘要 |
A spin scrubber is provided to safely verify a seating state of a wafer and quickly detect the damage of the wafer through interlock action of wafer position sensors. A scrubber device includes a spin chuck(100) loading and fixing a wafer(W), and at least two wafer position sensors(14,16) installed on an upper surface of the spin chuck. A detection sensor(200) is fixed to a center portion of the upper surface of the spin chuck to detect the damage of the wafer. A spin chuck shaft(120) fixes and rotates the spin chuck, and a signal line(210) penetrates the spin chuck to be connected to the detection sensor.
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