| 摘要 |
A rapid heat cooling device for a diffusion furnace is provided to lower an interior temperature of a process tube as a temperature of a heating member is maintained intact. A diffusion furnace includes a process tube(100) for receiving a wafer, a heater element provided on an outer portion of the process tube, and a blower(400) for supplying cooling air to cool the heater elements. The process tube is formed in a double tube shape, and an air inlet port(110) and an air drain port(120) are formed on a lower end of the process tube. The air inlet port is connected to the blower via a piping. A temperature sensor(200) is installed in the process tube, and a controller(500) is installed on the outer portion of the process tube and is connected with the sensor.
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