| 摘要 |
A stage apparatus is provided to smoothly drive a ball screw without causing excessive loads to the ball screw or a plate. A stage apparatus includes a stage moving mechanism for moving a work stage in a Z-axis direction. The stage moving mechanism includes three ball screws(2a,2b,2c), a plate(1), and a ball screw position restriction unit(8). The three ball screws are arranged in the Z-axis direction. The three ball screws are mounted on a stage base(10) such that at least two of the three ball screws are movable about one point as an axis. The plate is tilted with respect to the three ball screws, and moves the work stage in the Z-axis direction. The ball screw position restriction unit restricts movement of the ball screws with respect to the stage base.
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